広域サーミスタ真空計の試作
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概要
- 論文の詳細を見る
A thermistor Vacuum gauge has the merits of simple detecting circuit, high sensitivity and that it did not degenerate by operating it in air. However, it was so far difficult to measure the pressure below 10<SUP>-3</SUP>mmHg and above 1 mmHg. Therefore, for the purpose of extending the measuring pressure range, the theory of <I>Thermistor Vacuum Gauge</I> and the construction of sensing element was investigated. In consequence, it became possible to measure the pressure of 10<SUP>-5</SUP>mmHgmmHg by using new construction of sensor, extending a effective surface dimension by attaching radiation foils to bead-type thermistor and reducing thermal conductivity from lead by hanging the thermistor element with tungsten filaments.<BR>By hanging a bead type thermistor in a metal sleeve, it was also possible to measure the pressure of 10<SUP>-2</SUP>50mmHg.
- 日本真空協会の論文