油吸着トラップを用いた超高真空系について
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概要
- 論文の詳細を見る
Many kinds of inorganic substances are tested to use as an absorbent in nonrefrigerated isolation traps for ultra high vacuum systems.<BR>Its results are as follows.<BR>(1) Some porous inorganic substances, for example, asbestus, Isolite brick, Adsole, magnesium oxide and etc, are so effective as active alumina or artificial zeolite.<BR>(2) The system was consisting of an 1 stage oil booster pump combined with this type trap indicated to reach such a low pressure as nearly 1×10<SUP>-7</SUP> mmHg easily.<BR>(3) Exhausting tests of 70% r.h. air showed that the absorbents had never been poisoned.
- 日本真空協会の論文