高周波超音波変換器用ZnO薄膜の作成
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The effect of the crystalline properties of gold film on those of ZnO film was investigated in detail for a ZnO/gold/fused quartz structure. The investigations were done using X-ray diffraction, a rocking curve method, and RHEED. It was found that the crystalline properties of rf-sputtered ZnO films were strongly dependent on those of gold films. Highly c-axis-oriented ZnO films can be fabricated on the gold films whose σ for (111) rocking curves is less than 3°. The standard deviation σ for ZnO (002) rocking curve is decreased as the ZnO film thickness is increased and is less than 1° for 10μm ZnO films.
- 日本真空協会の論文
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