Ag-Nd系合金を用いた透明導電性薄膜の電気的・光学的特性の評価

概要

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We investigated optical and electrical properties and durability in salt water of multilayer transparent conductive films with Ag-Nd alloy. By DC magnetron sputtering, we prepared three layer transparent conductive film with a structure of ITO/Ag-Nd alloy/ITO/substrate. As Ag-Nd alloy, we tried Ag-0.48 wt%Nd-0.60 wt%Au alloy and Ag-0.41 wt% Nd-0.56 wt%Cu alloy. We measured transmittance and sheet resistance of these transparent conductive films before and after dipping test in salt water. We found that before the dipping test, sheet resistance of the transparent conductive multilayer films with Ag-Nd alloy was almost the same as that with pure Ag. After the immersion of these transparent conductive films into salt water, we found that the durability of the transparent conductive film with Ag-Nd-Au alloy was superior to those with pure Ag and Ag-Nd-Cu alloy.
日本真空協会の論文
2003-03-20