チタニウムゲッターイオンポンプの特性

概要

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This paper describes some improvements on the design of the Titanium Evapor-Ion Pump originally designed Py Prof. Herp. This also dercribes some experimental results obtained by the pump, which show the characteristics of the reaction of titanium on the gas in the pump. A slight change in the pump design brought a more stable operation of the pump ……a few hundred hours without repair. Titanium easily reacts on oxygen and hydrogen without excitation. Water vapor and perhaps also nitrogen are more efficiently sorbed by titanum with the aid of excitation or dissociation caused by energized electron current in the space.
日本真空協会の論文