プラズマ気相反応によるSiC超微粒子粉末の作製

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概要

• 論文の詳細を見る

• SiC powders having ultrafine grain size were prepared from CH<SUB>3</SUB>SiCl<SUB>3</SUB> by means of plasma gas phase reaction in Ar gas atmosphere. The reaction was taken place in an induction plasma torch with a double tube or a triple tube. Powders obtained contain β-SiC, a small fraction of 2H-SiC, and even Si when the triple tube torch was used. Average grain size of β-SiC powders depends on the structure of the torches, the flow rate of the raw material, and the deposition place. The average grain size of β-SiC powders deposited at the torch tube under the flow rate of 5×10<SUP>-4</SUP> mol/min is about 200A, and increases with increase of the raw material flow rate.

• 社団法人 粉体粉末冶金協会の論文

著者

• 犬飼 隆

  日本電信電話公社茨城電気通信研究所

関連論文

• プラズマ気相反応によるSiC超微粒子粉末の作製

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