MICROMACHINE DESIGN:An Important Goal

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概要

• 論文の詳細を見る

• Technologies for creating a variety of microsensors, microactuators, and micromachines continue to be developed at a rapid rate. However, the capability for engineers to design these devices has been hampered by inadequate and inappropriate design tools. This paper identifies some of the critical issues facing the field, and presents a vision for the future.

• 社団法人 電気学会の論文

著者

• Senturia Stephen

  Electrical Engineering Microsystems Technology Laboratories Massachusetts Institute of Technology

関連論文

• MICROMACHINE DESIGN:An Important Goal

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