水晶双音叉振動子を用いた高精度圧力センサ

概要

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We have developed a quartz pressure sensor for measuring with high accuracy. This sensor uses a dual tuning fork resonator which has frequency change by stress. Frequency change for full scale (FS) is about 10% on the basis of unloaded frequency. This sensor is good repeatability and hysteresis characteristics which is 0.005% FS and 0.008% FS respectively. In addition, pressure transducer are all fabricated by quartz through the technology of photolithography. Indeed, microprocessor-based measuring system is available with high speed counter timer to measure transducers frequency and to compensate transducers temperature characteristics and linearity.