工具のスパッタ・イオンプレーティング
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概要
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Ion plating has proved successful as surface hardening technique on tools. On the other hand, there are quite a few possibilities for the further development of current wear resistant coatings.Magnetron sputtering is one of promising ways for further development of this hard coating technology.First, this technique, Sputter Ion Plating, can easily bring multi component hard coatings. For instance, TiAlN shows superior oxidation resistance up to 700°C. Secondary, SIP is the simplest technique to get a success in low temperature coating as demonstrated in CrN and W:C films.
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