A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics
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概要
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Though miniaturization and mass production via integrated circuit fabrication techniques have transformed our society, the methods have yet to be successfully applied to the generation of motion, and as a consequence the many potential benefits of microrobotics has yet to be realized. The characteristics of electrostatic, electromagnetic and piezoelectric transduction for generating motion at the micro scale is considered, employing scaling laws and a reasoned consideration of the difficulties in motor fabrication and design using each method. The scaling analyses show that electrostatic, electromagnetic and piezoelectric actuators all have comparable force scaling characteristics of F∝L2; if one employs permanent magnets, electromagnetic forces do not scale as F∝L4. Though the torque, τ, of piezoelectric ultrasonic motors scale rather poorly with τ∝L4, they have the clear advantage of possessing torque amplitudes some two orders of magnitude larger than motors employing the other transduction schemes at the micro scale.
- 社団法人 日本音響学会の論文
著者
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Liu Daniel
Micronanophysics Res. Lab. Dep. Of Mechanical And Aerospace Engineering Monash Univ.
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Friend James
MicroNanophysics Research Laboratory, Department of Mechanical and Aerospace Engineering, Monash Uni
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Yeo Leslie
MicroNanophysics Research Laboratory, Department of Mechanical and Aerospace Engineering, Monash Uni
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Liu Daniel
MicroNanophysics Research Laboratory, Department of Mechanical and Aerospace Engineering, Monash University
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Friend James
MicroNanophysics Research Laboratory, Department of Mechanical and Aerospace Engineering, Monash University
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Yeo Leslie
MicroNanophysics Research Laboratory, Department of Mechanical and Aerospace Engineering, Monash University