Silicon carbide powder and sintered materials
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概要
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Silicon carbide (SiC) was first industrially synthesized in 1894 and has been used as refractories, abrasives and high temperature furnace parts. The basic fabrication and sintering technologies were almost established by about 1970. Recently, sintered SiC has become a key material as it has been widely used in advanced industries of semiconductors and high precision machines. New fabrication methods for modern SiC powders and sintering methods are being developed on the bases of traditional methods. In this review, the original studies and recent developments have been given maximum possible emphasis, and in particular, basic points of view are introduced.
著者
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Tanaka Hidehiko
National Institute For Research In Inorganic Materials Nirim
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Tanaka Hidehiko
National Institute For Materials Science Nano Ceramics Center
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Tanaka Hidehiko
National Inst. For Materials Sci. (nims)
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TANAKA Hidehiko
National Institute for Materials Science (NIMS)
関連論文
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