Investigation of Liquid Additives on the Nano-Hardness of NiFe during Polishing

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概要

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• For the optimization of polishing processes, the knowledge of the effectiveness of additives on the surface binding is essential. The nano-hardness was used as an indication for the most adequate acid used as additives. For analyzing the nano-hardness, nanoindentation tests were performed. This paper describes the investigations on the nano-hardness of NiFe affected by hydrochloric acid (HCl) and nitric acid (HNO3) used as liquid additives during a polishing process.

著者

• Wurz Marc

  Institute for Microtechnology, Leibniz Universität Hannover Center for Production Technology

• Pape Florian

  Institute for Microtechnology, Leibniz Universität Hannover Center for Production Technology

• Wark Michael

  Institute of Physical Chemistry and Electrochemistry, Leibniz Universität Hannover

• Gatzen Hans

  Institute for Microtechnology, Leibniz Universität Hannover Center for Production Technology

関連論文

• Investigation of Liquid Additives on the Nano-Hardness of NiFe during Polishing

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