インクジェットプリントヘッド用ニッケル製キャビティ基板のポリシング加工技術の研究 : —マイクロ両面ポリシング加工の条件確立—

概要

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In studying the process method for a nickel-cavity base-plate of an inkjet print head, the micro-press process (cold forging and micro-precise punching) was used to replace a silicon-cavity base-plate with a nickel-cavity base-plate. As a result, the punch life was extended to a mass-production level. Nevertheless, the deformation by the size of several micrometers resulted during the micro-press process still remained an issue. This paper introduces the processing technique to minimize the deformation when employing the double-sided micro polishing process. It flattens the bump of base-plate to the required 2micrometers or less in size. This study has found the hardness of polishing cloth and the supply quantity of slurry have an affect on the bump of base-plate.