Alumina based low permittivity substrate utilizing superplastically foaming method

スポンサーリンク

概要

• 論文の詳細を見る

• Alumina based closed pore dominated substrates have been fabricated by using superplastically foaming method developed by our group. Co-dispersing of magnesium aluminate spinel (Spinel) and zirconia without dopant (0YZ) provided adequate superplastisity to alumina matrix, while individual dispersion of spinel or zirconia resulted in only small deformation. The dielectric constant of superplastically foamed alumina decreased monotonically with porosity. Introduced pores were all closed nature at least up to 30% of porosity, at that porosity the permittivity became half as that of full dense one. Effect of the sweating water or ambient humidity has been proved to be identical to those of full dense one, which is favorable for semiconductor substrate.

• 公益社団法人 日本セラミックス協会の論文

著者

• Hayashi Hidetaka

  Division Of Chemistry And Biochemistry Graduate School Of Natural Science And Technology Okayama Uni

• KISHIMOTO Akira

  Division of Chemistry, Graduate School of Science, Hokkaido University

• WAKIYAMA Miyo

  Division of Molecular and Material Science, Graduate School of Natural Science and Technology, Okaya

• Kishimoto Akira

  Division Of Chemistry Graduate School Of Science Hokkaido University

• Kishimoto Akira

  Division of Chemistry and Biochemistry, Graduate School of Natural Science and Technology, Okayama University

• WAKIYAMA Miyo

  Division of Molecular and Material Science, Graduate School of Natural Science and Technology, Okayama University

• Wakiyama Miyo

  Division of Chemistry and Biochemistry, Graduate School of Natural Science and Technology, Okayama University

• HAYASHI Hidetaka

  Division of Molecular and Material Science, Graduate School of Natural Science and Technology, Okayama University

• KISHIMOTO Akira

  Division of Molecular and Material Science, Graduate School of Natural Science and Technology, Okayama University

関連論文

• Piezoresistivity of magnesia-graphite composite ceramics
• Pulse Radiolysis of a Ruthenium (III,III) Oxo-Acetato Dinuclear Complex in Acetonitrile
• Applicability of nitride powders as foaming agents in superplastically foamed ceramics
• Alumina based low permittivity substrate utilizing superplastically foaming method
• Fabrication of closed-pore inclusive low-permittivity substrates insensitive to ambient humidity
• The mechanical and thermal properties of porous zirconia ceramics fabricated through a solid-state foaming method (特集 金属および複合材料系における焼結技術としての新展開)

スポンサーリンク