Improvement of Vacuum-Ultraviolet Transparency of Silica Glass by Modification of Point Defects(Review)

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概要

• 論文の詳細を見る

• Silica glass is an important optical material in deep-ultraviolet (DUV, λ≤300 nm) and vacuum-ultraviolet (VUV, λ≤200 nm) spectral regions. However, DUV-VUV transparency of silica glass is significantly influenced by the presence of structural imperfections (point defects). This article describes point defects in silica glasses of low metallic impurity contents ("synthetic" silica glasses), and optical and chemical properties of these point defects. It is shown that controlled doping with specific point defects can improve the transparency and radiation hardness of silica glass in DUV-VUV spectral region. Such doped species include network modifiers that relax the glass structure and mobile interstitial hydrogen molecules. Utilization of these techniques in developing photomask substrates for F2 laser photolithography and DUV optical fibers for ArF laser transmission is presented.

• 社団法人　日本セラミックス協会の論文

著者

• Kajihara Koichi

  Transparent Electro-active Materials Project Erato-sorst Japan Sci. And Technol. Agency In Frontier

• KAJIHARA Koichi

  Transparent Electro-Active Materials Project, ERATO-SORST, Japan Science and Technology Agency, in Frontier Collaborative Research Center, Mail Box S2-13, Tokyo Institute of Technology

関連論文

• Isotope Effect on the Infrared Photoluminescence Decay of Interstitial Oxygen Molecules in Amorphous SiO_2
• Formation of Intrinsic Point Defects in Fluorine-doped Synthetic SiO_2 Glass by ^Co γ-ray Irradiation
• Improvement of Vacuum-Ultraviolet Transparency of Silica Glass by Modification of Point Defects(Review)

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