Problems in Impurity Analysis of an Insulating Powder Sample by SIMS

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概要

• 論文の詳細を見る

• This paper describes the source of variation in the SIMS determination of impurities in an insulating powder sample mixed together with graphite powders for electrical conductivity. The predominant factors were the local charge buildup on the sample surface and the local distribution of impurities originally present in the graphite powders. The local charge buildup due to the inhomogeneity of the tablet sample resulted in obvious changes of the secondary ion energy distributions. The local distribution of impurities in the graphite powders caused the occasionally anomalous high values in the determination.

• 日本質量分析学会の論文

著者

• Morikawa Hisashi

  Government Industrial Research Institute, Nagoya

• Uwamino Yoshinori

  Government Industrial Research Institute, Nagoya

• Ishizuka Toshio

  Government Industrial Research Institute, Nagoya

• Morikawa H

  National Industrial Research Institute

• IIDA Yasuo

  Government Industrial Research Institute, Nagoya

関連論文

• A method for evaluation of the component uniformity of a powder mixture by micro Fourier transform infrared spectrometry
• Analysis of Insulating Specimens by SIMS Using Extreme Sample Bias Shift Method
• Problems in Impurity Analysis of an Insulating Powder Sample by SIMS

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