ラジカル窒化処理法
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概要
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The glow discharge is risen between chamber and target in the mixed gas of hydrogen and ammonia. In this discharge the mixed gas changes to plasma, the reactive NH radical occurs and it leads to nitriding. Precise nitriding can be achieved on any materials according to purpose, because the reactive radical can be generated more efficiently than other nitriding technique.
- 電気製鋼研究会の論文