エレクトロニクス分野のレーザ微細加工

概要

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This paper presents an overview on the states of arts of laser macrofabrication in electronics industry. Various kinds of lasers and material processing technologies have been developed and applied for manufacturing electronic components and devices to meet the strong demands for high-performance, lightweight, low energy-consumption mobile digital consumer electronics, broadband optical fiber communications, etc. This paper emphasizes solid-state lasers as convenient and versatile light sources for manufacturing advanced compact components and devices with sensitive passive or active subcomponents having small feature sizes. Some of the representative material processing applications using advanced lasers for electronic components are, opaque and clear defects repairing of LCDs, trimming of chip-resistors and functional modules, laser patterning of amorphous solar-cells, forming of various micro-vias for high-density interconnection circuits, microadjustment of reed switches, and high-precision laser welding of electronic components such as optical modules, miniature relays and lithium ion batteries.
社団法人電気学会の論文
2003-02-01