ガス吸着法を用いた分子接合技術
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概要
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Attempt has been made to join borosilicate glass and cycloolefin(COP) polymer film by using gas adsorption method. After corona plasma treatment in air atmosphere, an (3-glycidoxypropyl)trimethoxysilane, GPS was adsorbed on glass and an (3-aminopropyl)triethoxysilane, APS on COP both in air atmosphere. After joining by a roll laminator, samples were annealed at 130 ℃ for 10 min. It was found that thickness of APS gas adsorption layer on COP rapidly increased to reach constant value after several minutes, where saturation thickness was estimated to be 1.1 nm by taking inelastic mean free path of Si2p photoelectron into consideration. Joining force more than 5N/25mm and long term durability in 60 ℃ and 90% RH were also confirmed. The results of ultrathin joining thus examined can be explained in terms of formation of hydrogen and covalent bonds at the interface by low temperature reaction process.
- 中部大学総合工学研究所の論文
中部大学総合工学研究所 | 論文
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