大気圧ヘリウムグロー放電の気体温度の測定
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概要
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In this report, experimental results on the gas temperature in sub-atmospheric pressure helium glow discharge are presented. Experiments were carried out with micro-plasma generated in a micro-hollow cathode discharge, 0.5mm in diameter and 3.0mm in length of cylindrical hollow drilled in the metal and ceramics sandwich structure by emission spectroscopy. To derive gas temperature, pressure broadening width and Doppler broadening width of helium line spectra of 667.8nm were analyzed. Obtained results showed qualitatively good agreement with other reports at higher gas pressure over 20kPa. Gas temperature grows from 300K at 20kPa linearly to 380K at 100kPa. But at lower pressure poor agreement were found, because of influence of Stark broadening, too low temperatures were derived.
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