サンドウィッチ型多自由度球面超音波モータ（第1報）3種類の振動モードの組み合わせ構成の検討

概要

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A sandwich-type multi-degree-of-freedom(MDOF) spherical ultrasonic motor is newly proposed. The motor consists of a spherical rotor which is held between two stator vibrators. The stator vibrator excites three kinds of vibration modes, and the spherical rotor can rotate on three axes. The contact surface between the spherical rotor and the stator vibrators forms the spherical surface. An experiment of making a large by a torque composition of two stators was carried out. Moreover, the displacement mechanism, with was used in the former model, to rotate the spherical rotor on the Z axis is no longer necessary, so that the freedom degree of the configuration design has been improved. This paper describes the construction and the operating principle of the MDOF ultrasonic motor, analysis results about the stator vibrator using a finite element and some measurement results from the trial manufacture. This motor has torques larger than those of former MDOF motor. The miniaturization of the MDOF motor and increase of torque were successfully realized.