Particle composition of high-pressure SF6 plasma with electron temperature greater than gas temperature
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概要
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Numerical computation was performed to derive particle compositions of high-pressure SF6 plasmas in which the electron temperature Te is greater than the gas temperature T g. The effective excitation temperature Tex for each of particles was proposed to express the distribution of particles in excited states. Furthermore, the relation equations for chemical equilibrium in a two-temperature plasma were developed on the basis of the second law of thermodynamics. At fixed Tg in the range of 6000-9000 K, the increasing Te from 9000-20 000 K encourages the dissociation and ionization of particles, causing the composition of SF6 plasma at 0.1 MPa to differ markedly from the composition under the condition of thermal equilibrium
- IEEEの論文
- 1997-10-00
IEEE | 論文
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