Diagnosis of large volume pulse modulated Ar-H2 plasmas
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概要
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Atmospheric pressure plasma in pre-mixed Ar/H2 flow was generated by pulse-modulation method. The coil length of the inductively-coupled plasma (ICP) torch was extremely large. The source side power was 30 kW before pulsation, and thus the plasma power had around 25.6 kW considering 85% matching efficiency.
- IEEEの論文
- 1999-06-00
IEEE | 論文
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