Characteristics of Machining Time of Brittle Material by Ultrasonic Complex Vibration Machining

概要

論文の詳細を見る
Using a combination of ultrasonic vibration and polishing slurry has been shown to be an effective method for machining holes in brittle materials such as glass. However, conventional ultrasonic methods use only longitudinal vibration. Whereas complex vibration sources with diagonal slits have been used in ultrasonic motors and ultrasonic welding, few studies have been conducted on ultrasonic machining using combinations of complex vibration and polishing slurry. Therefore, we have developed a new method using polishing slurry together with an ultrasonic complex vibration source performing longitudinal and torsional vibrations with diagonal slits for hole machining of brittle materials. We expect that the removal rate and machining accuracy can be improved using ultrasonic complex (longitudinal-torsional) vibration as compared with conventional machining using only longitudinal vibration. In this study, soda-lime glass is used as the processing material in ultrasonic complex and longitudinal vibration, and the machining time is measured to assess the hole machining characteristics showing that ultrasonic longitudinal-torsional vibration shortens the machining time.
一般社団法人電子情報通信学会の論文
2012-08-20