Analysis and Measurement Technique of Signal Transfer Characteristics in MEMs Probe Pins

概要

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In this paper, crosstalk of the MEMs probe connector pins arranged in a grid structure is analyzed with different number of ground pins employed. By employing more ground pins, the crosstalk characteristics enhance, of course, and the design guide for the parameters, such as pin's size and pitch is proposed to satisfy the given crosstalk limitation of -30dB in the high frequency range. The paper also presents a novel algorithm applied to characterize scattering parameters of a multiport interconnect circuit with a 4-port VNA (Vector Network Analyzer). By employing the renormalization of scattering matrices with different reference impedances at other ports, data obtained from 4-port configuration measurements can be synthesized to build the full scattering matrix of the DUT (Device-Under-Test, MEMs probe connector pins). In comparison to the conventional 2-port VNA methods, proposed technique has several advantages: saving of measuring time, and especially its robustness even with open-ended state of unmeasured ports. A good agreement of the estimated and correct S parameters verifies the validness of the algorithm.
2011-11-10