711 Megasonically Mold Filling for Replication of Complex Microstructures

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概要

• 論文の詳細を見る

• The novel method of filling complex micromold inserts for both positive and negative structures, i.e. high-aspect-ratio micropillar and deep microcavities are presented. Hollow microneedle array is the target prototype of such a complex replication. The mold features employed in this work are; an array of SU-8 pillars formed on a slope of silicon cavities and two-part insert of silicon cavity array aligned with comb structures. The cavities are fabricated using a combination technique of anisotropic wet etching and deep reactive ion etching. Megasonic agitation is applied during polymer casting into the mold inserts to resize the micro air-bubbles until disappeared.

• 一般社団法人日本機械学会の論文
• 2010-08-27

著者

• Khumpuang Sommawan

  Macro Beans Center Bio Electromechanical Autonomous Nano Systems (beans) Laboratory

• RUTHER Patrick

  Department of Microsystem Engineering, University of Freiburg

• Ruther Patrick

  Department Of Microsystem Engineering University Of Freiburg

関連論文

• 711 Megasonically Mold Filling for Replication of Complex Microstructures

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