P-HDI-11 Feasibility Study of Ultra-Low Particle Count Media Overcoat Deposited by FCA Method for 2 Tbpsi HDDs(Head/Disk Interface and Tribology,Technical Program of Poster Session)

概要

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Less than 2 nm thick carbon overcoat was deposited on a hard-disk media using a new filtered cathodic arc (FCA) deposition technique. This carbon overcoat showed high durability and anticorrosion characteristics comparable to those of 3 nm thick carbon overcoat deposited by the conventional plasma-enhanced chemical vapor deposition (PECVD) method. The major problem of utilization of FCA method in high volume manufacturing of hard-disk media is that large amount of particles on the surface. In this study, we have successfully prepared a thin overcoat with ultra-low particle count on the hard disk media surface while maintaining high deposition rate that is essential to have a high throughput in high volume production.
2009-06-17