MNS-12 Development of Pneumatic Servo Bearing Actuator for Nano-Positioning(Micro/Nanosystem Science and Technology III,Technical Program of Oral Presentations)

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概要

• 論文の詳細を見る

• A 'pneumatic servo bearing actuator (PSBA)' that consists of an aerostatic bearing and a servo valve was proposed and developed for ultraprecise positioning. In the actuator, pressurized air controlled by the servo valve moves an actuated spool ultra-precisely. Even under open-loop control, the PSBA had good repetition accuracy and positioning resolution on nanometer order. Applying simple position feedback and parallel observer that estimates the disturbance into the system increased the actuator's stiffness almost to be infinite and promoted the sharp step response without any drift and hysteresis.

• 一般社団法人日本機械学会の論文
• 2009-06-17

著者

• MATSUOKA Takashi

  Doshisha University

• HIRAYAMA Tomoko

  Doshisha University

• Satoshi Katto

  Doshisha University

• Kadotani Masato

  Doshisha University

• Kitagawa Takakazu

  Doshisha University

• Sasaki Katsumi

  Pneumatic Servo Controls Ltd.

関連論文

• Effects of Deposition Conditions on Adhesion of DLC Films Prepared by UBM Sputtering
• MNS-12 Development of Pneumatic Servo Bearing Actuator for Nano-Positioning(Micro/Nanosystem Science and Technology III,Technical Program of Oral Presentations)

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