MNS-04 MECHANICAL AND TRIBOLOGICAL PROPERTIES OF NANOSTRUCTURED Cr-C-N_x FILMS GROWN AT VARYING NITROGEN CONCENTRATION(Micro/Nanosystem Science and Technology I,Technical Program of Oral Presentations)

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概要

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• Nanostructured Cr-C-N_x films were deposited onto Si (100) wafers and high-speed-steel substrates (HSS) by unbalanced reactive dc magnetron sputtering where N_2 was controlled by optical emission monitor (OEM). By XRD, at higher OEM %, pure metal bcc-Cr, cubic CrN and hexagonal β-Cr_2N phases are found in co-existence. Nanohardness correlates with the CrN and hexagonal β-Cr_2N crystalline phases (N/Cr ratio of 0.79, at OEM 55%) and is found to be 27 GPa with elastic modulus 190 GPa. The friction coefficient value of a film at OEM 55% is 3.6 only.

• 2009-06-17

著者

• Vyas A.

  Department Of Mechanical Engineering

• LI K.Y.

  Department of Manufacturing Engineering and Engineering Management, City University of Hong Kong

• Li K.y.

  Department Of Manufacturing Engineering And Engineering Management City University Of Hong Kong

関連論文

• MNS-04 MECHANICAL AND TRIBOLOGICAL PROPERTIES OF NANOSTRUCTURED Cr-C-N_x FILMS GROWN AT VARYING NITROGEN CONCENTRATION(Micro/Nanosystem Science and Technology I,Technical Program of Oral Presentations)

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