MNS-04 MECHANICAL AND TRIBOLOGICAL PROPERTIES OF NANOSTRUCTURED Cr-C-N_x FILMS GROWN AT VARYING NITROGEN CONCENTRATION(Micro/Nanosystem Science and Technology I,Technical Program of Oral Presentations)
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概要
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Nanostructured Cr-C-N_x films were deposited onto Si (100) wafers and high-speed-steel substrates (HSS) by unbalanced reactive dc magnetron sputtering where N_2 was controlled by optical emission monitor (OEM). By XRD, at higher OEM %, pure metal bcc-Cr, cubic CrN and hexagonal β-Cr_2N phases are found in co-existence. Nanohardness correlates with the CrN and hexagonal β-Cr_2N crystalline phases (N/Cr ratio of 0.79, at OEM 55%) and is found to be 27 GPa with elastic modulus 190 GPa. The friction coefficient value of a film at OEM 55% is 3.6 only.
- 2009-06-17
著者
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Vyas A.
Department Of Mechanical Engineering
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LI K.Y.
Department of Manufacturing Engineering and Engineering Management, City University of Hong Kong
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Li K.y.
Department Of Manufacturing Engineering And Engineering Management City University Of Hong Kong