S1103-4-1 小型機械部品への超高速DLC成膜プロセス開発のための基礎研究(第15回卒業研究コンテスト(4))

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概要

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• Recently, the cost reduction of DLC (Diamond-Like Carbon) coating is more strongly required with increasing demand for DLC coatings because of their excellent mechanical properties. Therefore, developmetn of higher-speed coating method employing plasma CVD with higher-density plasma is required. We performed DLC coating to a stainless-steel flat specimen (JIS SUS304) with the MVP (Microwave-sheath Voltage combination Plasma) method which is a promissing method to generate high-density plasma (n_c>10^<12> cm^<-3>) along metal surfaces. In this work, the highest deposition rate of DLC obtained by the new method with 2.45 GHz microwave and DC-pulsed bias was 73.2μm/h, where the gas flow rates of Ar, H_2, CH_4 and tetra methyl silane were 5, 1.8, 17 and 4 seem, respectively at an averaged microwave power of 93 W, bias voltage of-200 V and gas pressure of 75 Pa. The hardness of the film was 12.2 GPa.

• 2009-09-12

著者

• 岡本 隆志

  名大

関連論文

• S1103-4-1 小型機械部品への超高速DLC成膜プロセス開発のための基礎研究(第15回卒業研究コンテスト(4))

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