An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography(<Special Section>Recent Technologies for Microwave and Millimeter-wave Passive Devices)
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概要
- 論文の詳細を見る
An ultra-deep polymer cavity structure exposed using deep X-ray lithography is used as a template for metal electroforming to produce a 24-GHz cavity resonator. The metal cavity is 1.8mm deep and has impressive structure, including extremely vertical and smooth sidewalls, resulting in low conductor loss. The measured resonator has an unloaded quality factor of above 1800 at a resonant frequency of 23.89Hz.
- 社団法人電子情報通信学会の論文
- 2007-12-01
著者
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Mohr Jurgen
Institute For Microstructure Technology Forschungszentrum Karlsruhe
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KLYMYSHYN David
TRLabs and the University of Saskatchewan
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MA Zhen
TRLabs and the University of Saskatchewan
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Klymyshyn David
Trlabs And The Department Of Electrical Engineering University Of Saskatchewan
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Ma Zhen
Trlabs And The Department Of Electrical Engineering University Of Saskatchewan
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ACHENBACH Sven
TRLabs and the Department of Electrical Engineering, University of Saskatchewan
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BORNER Martin
Institute for Microstructure Technology, Forschungszentrum Karlsruhe
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DAMBROWSKY Nina
Institute for Microstructure Technology, Forschungszentrum Karlsruhe
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Borner Martin
Institute For Microstructure Technology Forschungszentrum Karlsruhe
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Achenbach Sven
Trlabs And The Department Of Electrical Engineering University Of Saskatchewan
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Dambrowsky Nina
Institute For Microstructure Technology Forschungszentrum Karlsruhe
関連論文
- The LINT Modulator : Linear Modulation with Nonlinear Translation(Special Issue on Low-Distortion, High-Power, High-Efficiency Active Device and Circuit Technology)
- Wideband Microstrip Bandpass Filter Based on EBG Concept(Recent Technologies for Microwave and Millimeter-wave Passive Devices)
- An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography(Recent Technologies for Microwave and Millimeter-wave Passive Devices)