CI-2-11 Silicon-Photonics R/D Activities and MPW Services in IME/Singapore

概要

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In anticipating the convergence of electronic and photonic onto single chip, we have been actively developing and enhancing the Silicon-photonics platform technology since 2006. On SOI substrate, it focuses on the development of advanced process module and integration technology for photonic passives and high-performance actives devices. To promote Si-photonic industry along with academic research activities, upon researching and establishing a suite of technology and component library, IME/Singapore facility access has been made available via cost-sharing multi-project wafer (MPW) program (details are in website http://www.ime.a-star.edu.sg/PPSSite /index.asp). The following describes these activities.
社団法人電子情報通信学会の論文
2009-03-04