Sb添加In_2O_3の電気及び光学的特性
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概要
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Sb-doped In_2O_3 thin films were prepared by rf(radio frequency) magnetron sputtering method. The deposited films are flat surface and polycrystalline structure. The optical transparency is high in the visible region.. Minimum resistivity is observed 4.38×10^<-3> (Ω・cm) and the optical fundamental absorption edge is 3.17eV at room temperature in sputtered films.
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