Self-assembled Carbon Nanotube Network Films Field Effect Transistor for Biosensor Application(Session4B: Emerging Devices II)

概要

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We investigate the electrical properties of the self-assembled carbon nanotube network films using 3-terminal field effect transistor configuration. P-type Si wafer was used as a starting substrate and 50nm thickness of SiO_2 was deposited by PECVD. Self-assembled monolayer (SAM) with amine-terminated molecules was deposited on SiO_2 surface to enhance adhesion of the CNT films on the substrate. After the surface modification, semiconducting single-walled carbon nanotubes (SWCNTs) dispersed on dimethylformamide (DMF) solution was immobilized on the substrate to make CNT network films over a large surface area. To make source/drain Au electrodes, evaporation and lift-off process was performed by using a conventional photolithographic method. As a result, this device showed electrical behavior of p-type FET with I_<on>/I_<off> of 10^4, which is promising for their potential applications as bio-sensing devices.
社団法人電子情報通信学会の論文
2008-07-02