Dynamical behavior of methylchloride on GaAs(001)
スポンサーリンク
概要
- 論文の詳細を見る
The dynamical behavior of methylchloride (CH3Cl), which is an important precursor in the atomic order etching of III-V compounds, was studied on a GaAs(001)-2x4 surface using a supersonic molecular beam. Direct scattering and trapping/desorption channels of incident CH3Cl were assigned based on a detailed analysis of incident energy and angle dependence of the scattered molecule. A large energy exchange from translational to rotational modes was observed for directly scattered CH3Cl. A trajectory simulation was conducted to quantitatively explain the angle dependence of scattered CH3Cl, energy exchange at collision, and the energy dependence of trapping probability on the surface.
- 宮崎大学の論文
- 2008-08-30
著者
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尾関 雅志
University of Miyazaki, Electrical and Electronic Engineering
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冨川 満広
University of Miyazaki, Electrical and Electronic Engineering
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鬼塚 尚幸
University of Miyazaki, Electrical and Electronic Engineering
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冨川 満広
University Of Miyazaki Electrical And Electronic Engineering
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鬼塚 尚幸
University Of Miyazaki Electrical And Electronic Engineering