5704 水晶振動子マイクロバランスを用いた固体表面近傍液膜の粘弾性評価(J21-1 マイクロナノ理工学(1),J21 マイクロナノ理工学)

概要

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Lubrication by a molecularly thin film has become very important in micro machines, magnetic recording disks and so on. Molecularly thin film is considered a good lubricant for these micro devices. When, the thickness of the lubricant film is thinned to several nanometers, the physical properties of the film become different from that of the bulk. Therefore it is important to know these properties. Quartz crystal microbalance (QCM) is common in thin film growth, where it is used for film thickness measurements. The quartz crystal oscillates in transverse shear mode at its resonant frequency that is affected by the adsorbed mass of non-viscous elastic film or the viscosity and the density of the adsorbed liquid. By using this relarion, QCM allows one to evaluate the physical properties of adsorbed layer on the quartz crystal surface. In this study, we develop the evaluation method of physical properties of adsorbed layers by using QCM.
社団法人日本機械学会の論文
2006-09-15