水溶液から析出させたZnO_2前駆体を経由した透明なZnO薄膜の作製(<特集>水溶液科学に立脚したセラミックス合成プロセス)

概要

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Highly transparent ZnO thin films were prepared by calcining ZnO_2 precursor films deposited from aqueous solutions. The transparency of the resultant ZnO thin films, which was directly associated with that of the precursor films, depended on the kind of zinc source, the composition of the starting solution, and the deposition temperature of the ZnO_2 precursor. The most highly transparent ZnO thin film was obtained by calcining a ZnO_2 precursor film which was deposited from a solution containing 0.01mol/dm^3 of ZnSO_4, 1.8mol/dm^3 of H_2O_2, and 2.1mol/dm^3 of NH_3 at 303K. Doping of a ZnO thin film with indium was attempted by an immersion of the thin film in an In (NO_3)_3 solution and a subsequent heat-treatment at 773K in a N_2 atmosphere, which resulted in an electrical conductivity of 535S/m.
社団法人日本セラミックス協会の論文
2007-12-01