Selective Effect of Laser Irradiation on Diamond-Like Film Growth : Surfaces, Interfaces, and Films
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概要
- 論文の詳細を見る
A study of the effect of low-power laser radiation (from 5×10^1 to 2×10^5W/cm^2) on volume and surface microinclusions of graphite-like carbon during diamond-like film growth by chemical vapour deposition (CVD) is presented. Suppression of the formation of amorphous and graphite-like carbon and improvement of diamond-like films structure quality were achieved by illuminating the growing films with laser radiation with an energy in the range of an absorption band of defects.
- 社団法人応用物理学会の論文
- 2002-12-01
著者
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Yu Seong-cho
Department Of Physics Chung-buk National University:department Of Physics University Of Maryland
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Prudnikov Anatolii
Donetsk Physico-technical Institute Of Ukrainian Academy Of Sciences
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VARYUKHIN Victor
Donetsk Physico-Technical Institute of Ukrainian Academy of Sciences
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SHALAEV Rostislav
Donetsk Physico-Technical Institute of Ukrainian Academy of Sciences
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ULYANOV Alexandr
Donetsk Physico-Technical Institute of Ukrainian Academy of Sciences
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Ulyanov Alexandr
Donetsk Physico-technical Institute Of Ukrainian Academy Of Sciences:department Of Physics Chungbuk
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