Low-Temperature Fabrication of High-Coercivity L1_0 Ordered FePt Magnetic Thin Films by Sputtering : Magnetism
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概要
- 論文の詳細を見る
We report that fully ordered L1_0 FePt magnetic thin films with high coercivity can be fabricated by a simple sputtering method at a substrate temperature of 300℃. Although fcc→L1_0 ordering proceeds only above 600℃ in ex situ annealing of disordered FePt films, the ordering occurs spontaneously by surface diffusion during the sputtering process of FePt alloy upon heating the substrate at 300℃. High coercivity larger than 7 kOe was achieved from the as-sputtered state.
- 社団法人応用物理学会の論文
- 2001-12-15
著者
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HONO K.
National Institute for Materials Science
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OHNUMA M.
National Institute for Materials Sciences
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Hono K.
National Institute For Materials Sciences
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Hono K.
National Research Institute For Metals
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TAKAHASHI Y.
National Institute for Materials Science
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Hono K
National Institute For Materials Sciences
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Ohnuma M
National Institute For Materials Sciences
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Hono K.
National Institute For Material Science (nims)
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Ohnuma M.
National Institute For Materials Science
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Hono K.
National Inst. For Materials Sci. Tsukuba Jpn
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Takahashi Y.K.
National Institute for Materials Science
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