As-Grown Deposition of Superconducting MgB_2 Thin Films by Multiple-Target Sputtering System : Superconductors

概要

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As-grown superconducting MgB_2 thin films were prepared using a multiple-target sputtering system. The targets were pure B and Mg metal. The MgB_2 thin films were deposited at substrate temperatures (T_s) ranging from 207℃ to 268℃ on Al_2O_3 (1102) substrates. We found that the critical temperatures (T_c) of the films were increased with increase of the Ts. The film grown at a Ts of 252℃ showed the highest T_<c,onset> value of 27.8 K and had a sharp transition (ΔT_c=0.5 K) in the resistivity.
社団法人応用物理学会の論文
2002-02-01