Study on characteristics of solution-processible inorganic dielectrics for pentacene thin film transistors (Silicon devices and materials: 第15回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2007))

概要

論文の詳細を見る
In this paper, we study on characteristics of organic thin-film transistors (OTFTs) using pentacene as an organic semiconductor with spun-on inorganic gate dielectrics. The organic gate dielectrics have been used for OTFTs because of solution-processibility, while the OTFTs with organic dielectrics have the electrical problems. Therefore, we fabricated pentacene transistors with solution-processible inorganic-organic gate dielectrics structure, successively measured the surface properties and electrical characteristics according to different gate dielectric materials. We achieved that the inorganic dielectrics were formed solution-processible methyl siloxane-based spin-on-glass (SOG) film has a potential for OTFTs as gate dielectric materials.
2007-06-18