Bolometric IR spectrometer based on vanadium oxide array (Silicon devices and materials: 第15回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2007))

概要

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The proposed infrared (IR) micro-spectrometer consists of two parts, the grating structure and the bolometric IR detector array. Multi-slit grating structure, separates incident IR rays into different wavelength components. The V_2O_5 bolometer-based IR detector array detects the separated IR spectral components arriving at the specific positions designed for a specific wavelength. These two components are independently fabricated and bonded together by polymer bonding method. The fabricated IR spectrometer instantaneously detects the incoming IR spectra by detecting resistance variation of the bolometer due to its temperature change caused by the incident infrared radiation. In this paper, the design and fabrication methods of bolometric IR spectrometer are presented, and its spectral performance is also measured.
社団法人電子情報通信学会の論文
2007-06-18