Thermal Analysis of Pyroelectric Sensors in Scanning Thermal Microscopy
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概要
- 論文の詳細を見る
A scanning pyroelectric sensor is theoretically described as a device which contains five subsystems in cascade and each subsystem is characterized by its transfer function. The optimal scanning speed mainly depends on the dynamic response of the sensor itself, therefore electrical and thermal responses of the sensor structure were investigated. With harmonically modulated radiation, an analytic solution of the multilayer structure is derived by solving the heat conduction equation with heat-sink boundary conditions. Experiments were performed by scanning a pyroelectric sensor under a laser beam and compared to theoretical results.
- 社団法人応用物理学会の論文
- 2002-11-30
著者
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Koehler Reinhard
Institute For Solid Stare Electronics Dresden University Of Technology
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LIN Wen-Mei
Institute for Solid Stare Electronics, Dresden University of Technology Institute for Solid Stare El
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SUCHANECK Gunnar
Institute for Solid Stare Electronics, Dresden University of Technology
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GERLACH Gerald
Institute for Solid Stare Electronics, Dresden University of Technology
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Suchaneck Gunnar
Institute For Solid Stare Electronics Dresden University Of Technology
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Lin Wen-mei
Institute For Solid Stare Electronics Dresden University Of Technology Institute For Solid Stare Ele
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Gerlach Gerald
Institute For Solid Stare Electronics Dresden University Of Technology