Fabrication of a Cantilever Structure for Piezoelectric Microphone
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-11-30
著者
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Zhang Lin-tao
Institute Of Microelectronics Tsingian University
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Li Z‐j
Tsinghua Univ. Beijing Chn
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Liu J‐s
Institute Of Microelectronics Tsingian University
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REN Tian-Ling
Institute of Microelectronics, Tsingian University
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LIU Jian-She
Institute of Microelectronics, Tsingian University
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LIU Li-han
Institute of Microelectronics, Tsingian University
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LI Zhi-Jian
Institute of Microelectronics, Tsingian University
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Liu Li-han
Institute Of Microelectronics Tsingian University
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Liu Jian-she
Institute Of Microelectronics Tsingian University
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Ren Tian-ling
Institute Of Microelectronics Tsingian University
関連論文
- Fabrication of a Cantilever Structure for Piezoelectric Microphone
- Silicon-Based PbTiO_3/Pb(Zr,Ti)O_3/PbTiO_3 Sandwich Structure
- Investigation on Annealing and Etching Effects for Pt/Bi3.15Nd0.85Ti3O12/Pt Ferroelectric Capacitors