Nanopatterning with Microdomains of Block Copolymers using Reactive-Ion Etching Selectivity
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-10-15
著者
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Asakawa Koji
Advanced Materials And Devices Laboratory Corporate Research & Development Center
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HIRAOKA Toshiro
Advanced Materials and Devices Laboratory, Corporate Research & Development Center
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Hiraoka Toshiro
Advanced Materials And Devices Laboratory Corporate Research & Development Center