Gas Temperature Measurement in a Surface-Wave Argon Plasma Column at Low Pressures

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概要

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• A simple experimental technique to measure the axial average gas temperature in a surface-wave-produced and -sustained plasma has been developed. This experimental method is based on the assumption of a viscous laminar gas regime, and evaluates the gas temperature through the changes in the upstream and downstream pressures when the plasma is switched on and off. Two time scales have been found in the heating and cooling processes, a faster one related to the gas, and a slower one related to the vessel. In addition, the axial average gas temperature has been evaluated as a function of the gas pressure and theincident microwave power at the gap.

• 社団法人応用物理学会の論文
• 2002-09-15

著者

• Lao C.

  Departamento De Fisica Aplicada Universidad De Cordoba

• Lao C.

  Departamento De Fisica Aplicada Campus De Rabanales. Universidad De Cordoba

• Barranco A.

  Instituto De Ciencia De Mareriales De Sevilla Isla De La Cartuja Csic-universidad De Sevilla

• Cotrino J

  Univ. Sevilla Sevilla Esp

• Gonzalez-elipe A.

  Instituto De Ciencia De Mareriales De Sevilla Isla De La Cartuja Csic-universidad De Sevilla

• PALMERO A.

  Departmento de Fisica Atomica, Molecular y Nuclear, Facultad de Fisica, Universidad de Sevilla

• COTRINO J.

  Departmento de Fisica Atomica, Molecular y Nuclear, Facultad de Fisica, Universidad de Sevilla

• Palmero A

  Univ. Sevilla Sevilla Esp

関連論文

• Excitation Equilibria in an Argon Surface-Wave-Produced and -Sustained Plasmas
• Gas Temperature Measurement in a Surface-Wave Argon Plasma Column at Low Pressures

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