Patterned Magnetic Permalloy and Nickel Films : Fabrication by Electron Beam and X-Ray Lithographic Techniques

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概要

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• Electron beam (e-beam) and X-ray lithographic techniques have been used to fabricate permalloy (NisoFe2o) and nickel rectangular and triangular dots and antidots on an area of (1 x 1) mm^2. Dot dimensions and spacings range from 500 urn to 1 μm and from 250 nm to 50 nm, respectively. The changes of the magnetic properties induced by patterning have been studied by means of magneto-optic Kerr effect (MOKE) magnetometry and the Brillouin light scattering (BLS) technique.

• 社団法人応用物理学会の論文
• 2002-08-15

著者

• Fabrizio Enzo

  Tasc-infm

• Mastrogiacomo Luigi

  Cnr-iess Istituto Di Elettronica Dello Stato Solido

• Cabrini S

  Lilit Beam Line National Nanotechnology Laboratory-tasc Istituto Nazionale Per La Fisica Materia (in

• CANDELORO Patrizio

  INFM, Dipartimento di Fisica, Universini di Perugi

• GERARDINO Annamaria

  CNR -lESS, Istituto di Elettronica dello Stato Solido

• CABRINI Stefano

  CNR -lESS, Istituto di Elettronica dello Stato Solido

• GIANNINI Giorgio

  CNR-IESS, Istituto di Elettronica dello Stato Solido

• CIRIA Miguel

  Department of Materials Science and Engineering, Massachusetts Institute of Technology

• GUBBIOTTI Gianluca

  INFM, Dipartimento di Fisica, Universini di Perugi

• CARLOTTI Giovanni

  INFM, Dipartimento di Fisica, Universini di Perugi

• Ciria Miguel

  Department Of Materials Science And Engineering Massachusetts Institute Of Technology

• Giannini Giorgio

  Cnr-iess Istituto Di Elettronica Dello Stato Solido

• Carlotti Giovanni

  Infm Dipartimento Di Fisica Universini Di Perugi

• Gubbiotti Gianluca

  Infm Dipartimento Di Fisica Universini Di Perugi

• Candeloro P

  Inst. Nazionale Per La Fisica Della Materia (infm) At Elettra Trieste Ita

• Gerardino Annamaria

  Cnr -less Istituto Di Elettronica Dello Stato Solido

関連論文

• Patterned Magnetic Permalloy and Nickel Films : Fabrication by Electron Beam and X-Ray Lithographic Techniques
• X-Ray Lithography Patterning of Magnetic Materials and Their Characterization

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