Micro Electro Mechanical Systems (MEMS) Micro-Switches for Use in DC, RF, and Optical Applications : Review Paper

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概要

• 論文の詳細を見る

• Micromachined micro-switches have stimulated the development of the core infrastructure technology for the next generation communication systems because of their superior performance. They are fabricated by similar silicon micromachined processes, but the switch structure and its characteristics depend on each application. Micro electro mechanical systems (MEMS)technology has been applied to micro relays, RF switches, and optical switches; as a result, optical and mechanical performance has been improved.

• 社団法人応用物理学会の論文
• 2002-06-30

著者

• Suzuki Kenichiro

  Functional Devices Research Laboratories Nec Corporation

関連論文

• Micro Electro Mechanical Systems (MEMS) Micro-Switches for Use in DC, RF, and Optical Applications : Review Paper

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