Reliable Two/Dimensional Carrier Profiling by Scanning Spreading Resistance Microscopy on InP/Based Devices With Fast Quantification Procedure

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概要

• 論文の詳細を見る
• 2002-02-28

著者

• Wei Xu

  Imec

• Xu Ming

  Imec

• EYBEN Pierre

  IMEC

• HANTSCHEL Thomas

  Palo Alto Research Center, Xerox Corporation

• VANDERVORST Wilfried

  Also at KU Leuven, INSYS, Kard

• Vandervorst Wilfried

  Also At Ku Leuven Insys Kard

• Hantschel Thomas

  Palo Alto Research Center Xerox Corporation

関連論文

• Reliable Two/Dimensional Carrier Profiling by Scanning Spreading Resistance Microscopy on InP/Based Devices With Fast Quantification Procedure

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