MEP-01: A Novel Polishing Method using Abrasive Dispersion Typed Functional Fluid(MEP-I: MECHANICAL PROCECCING)

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概要

• 論文の詳細を見る
• 2005-06-19

著者

• MURAOKA M.

  Akita University

• Akagami Y.

  Akita Pref. Ind. Tech. Center

関連論文

• MEP-01: A Novel Polishing Method using Abrasive Dispersion Typed Functional Fluid(MEP-I: MECHANICAL PROCECCING)
• SMS-02: Measurement of Thin Film Elasticity Using Nanoscopic Contact Resonance of a Flat Tip in Sensitivity-Enhanced Atomic Force Acoustic Microscopy(SMS-I: SMART MATERIALS AND STRUCTURES, NDE)

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